MICROMACHINED REACTORS FOR CATALYTIC PARTIAL OXIDATION REACTIONS

Silicon-based microfabrication of a novel chemical reactor (microreact or) having submillimeter flow channels with integrated heaters, and fl ow and temperature sensors is described. The potential application of this reactor to partial-oxidation reactions is explored by using Pt-ca talyzed NH3 oxidation as a model reaction. Investigation of reactor be havior as a function of operating conditions shows that conversion and selectivity behavior of conventional laboratory reactors can be repro duced and demonstrates the feasibility of conducting chemical reaction s in microfabricated systems. Ignition-extinction behavior is explored , along with high-temperature microreactor materials degradation. Pote ntial applications and scale-up of microreactors are also discussed.