ON THE FORMATION OF VOIDS IN THIN-FILM METAL INTERCONNECTS

Authors
SHEN YL
Citation
Yl. Shen, ON THE FORMATION OF VOIDS IN THIN-FILM METAL INTERCONNECTS, Scripta materialia, 37(11), 1997, pp. 1805-1810
Citations number
8
Categorie Soggetti
Material Science","Metallurgy & Metallurigical Engineering
Journal title
Scripta materialia → ACNP
ISSN journal
13596462
Volume
37
Issue
11
Year of publication
1997
Pages
1805 - 1810
Database
ISI
SICI code
1359-6462(1997)37:11<1805:OTFOVI>2.0.ZU;2-9