CAPABILITIES OF COMBINED STUDIES OF DLC FILMS BY X-RAY-METHODS

We demonstrate the possibility of determining a large group of physica l properties of DLC films using only one group of methods based on X-r ay interference studies. These include methods the determination of th e film thickness, material density and roughness of the surface. We pr esent the analysis of possibilities to use the method of the two-cryst al X-ray spectrometer to evaluate internal stress and to deduce the mo dules of elasticity and thermal expansion coefficients of the film. It is shown that this method can be used for the in-situ control of the film parameters during the film deposition in the technological chambe r. (C) 1997 Elsevier Science S.A.