We show that temperature compensation based on differential thermal ex
pansion between sapphire and fused silica can be used to create a Fabr
y-Perot cavity viith an exceptionally low coefficient of thermal expan
sion at low temperatures. We describe the design of such a cavity that
utilizes shaped fused silica mirrors and a sapphire spacer. The geome
try of the fused silica mirror was designed using a finite element mod
el to have a small platform, giving a frequency temperature turning po
int of 16.6 K. The measured turning point was 16.2 K and the curvature
was 6 x 10(-10) K-2, both of which were consistent with the model. (C
) 1997 Optical Society of America.