Ta. Germer, ANGULAR-DEPENDENCE AND POLARIZATION OF OUT-OF-PLANE OPTICAL-SCATTERING FROM PARTICULATE CONTAMINATION, SUBSURFACE DEFECTS, AND SURFACE MICROROUGHNESS, Applied optics, 36(33), 1997, pp. 8798-8805
The angular dependence and the polarization of light scattered by a sm
all particle a distance d inside and outside a reflecting surface is c
alculated in the Rayleigh limit. This calculation yields expressions f
or the polarized bidirectional reflectance distribution function matri
ces for in-plane and out-of-plane scattering. The results are compared
with those obtained from microroughness-induced scattering. For the p
-in/p-out configuration with oblique incidence, there exist out-of-pla
ne angles for which scattering that is due to one of the mechanisms va
nishes, whereas that from the others does not. By exploiting this know
ledge, me can make improvements in the detection of small particles or
subsurface defects. It is also shown that one must take care when dif
ferentiating subsurface-defect-induced scattering from microroughness-
induced scattering using in-plane scattering and wavelength scaling la
ws.