ON THE ZERO-ORDER DIFFRACTION OF PHASE MASK

Authors
WEN PY CUI XM LIU HD PUN EYB CHUNG PS
Citation
Py. Wen et al., ON THE ZERO-ORDER DIFFRACTION OF PHASE MASK, Chinese Physics Letters, 14(11), 1997, pp. 830-833
Citations number
6
Categorie Soggetti
Physics
Journal title
Chinese Physics Letters → ACNP
ISSN journal
0256307X
Volume
14
Issue
11
Year of publication
1997
Pages
830 - 833
Database
ISI
SICI code
0256-307X(1997)14:11<830:OTZDOP>2.0.ZU;2-D
Abstract
The zero-order diffraction of phase grating mask is analysed for recta ngular and sinusoidal corrugated profiles, and a novel method is propo sed for determining the depth and duty cycle parameter by the diffract ion measurement at different wavelengths.