SECONDARY-ION EMISSIONS FROM FLUOROLUBRICANTS UNDER SEVERAL PRIMARY BEAM CONDITIONS BY TOF-SIMS

Using fluorolubricants on 8 mm video tape and a hard disk, a basic asp ect of secondary ion emission was investigated by TOF-SIMS under sever al primary beam conditions and film thicknesses. The results are discu ssed from the point of view of reproducibility of the intensity ratio. It was found that the influence of primary beam energy, angle and spe cies is negligible when compared with other artifacts such as the cond itions of charge compensation and the spectrometer transmission, etc. For more than 2 nm film thickness, the 1-6% relative standard deviatio n was found to be comparable with those of primary beam energy, angle and species. (C) 1997 Elsevier Science B.V.