PREPARATION OF (N)A-SI-H (P)C-SI HETEROJUNCTION SOLAR-CELLS/

Heterojunction solar cells have been manufactured by depositing n-type a-Si:H on p-type 1-2 Omega cm CZ single crystalline silicon substrate s. Although our cell structure is very simple - neither a BSF nor a su rface texturing is used - a conversion efficiency of 13.1% has been ac hieved on an area of 1 cm(2). In this paper the technology is describe d and the dependence of the solar cell parameters on the properties of the n-type a-Si:H layer is discussed. It is shown that this cell type exhibits no degradation under light exposure.