Xb. Liao et al., MICROCRYSTALLINE SILICON FILMS AND TANDEM SOLAR-CELLS PREPARED BY TRIODE PECVD, Solar energy materials and solar cells, 49(1-4), 1997, pp. 171-177
This paper investigates the effects of the diphasic structure on the o
ptoelectronic properties of hydrogenated microcrystalline silicon (mu
c-Si:H) films prepared in a triode three-chamber plasma-enhanced chemi
cal vapor deposition (PECVD) system. The influences of boron-compensat
ion doping on the dark-and photo-conductivity of mu c-Si:H films are a
lso described. A tandem solar cell with an entirely mu c-Si:H p-i-n bo
ttom cell and an a-Si:H top cell has been prepared with an initial con
version efficiency of 8.91% (0.126 cm(2), AM1.5, 100 mW/cm(2)).