We present and characterize the first epitaxial Si/CuTnS(2) heterojunc
tion devices. By means of molecular beam epitaxy (MBE), slightly coppe
r-rich CuInS2 epilayers are deposited on sulphur-terminated Si-(1 1 1)
surfaces of n-type wafers. Both the quality of the substrate and the
deposited epilayer are controlled in situ using low-energy electron di
ffraction (LEED) and Auger electron spectroscopy (AES) and various oth
er methods including transmission electron microscopy (TEM) are applie
d in the ex situ structural characterization. The heterojunction diode
s are completed by the deposition of an indium-tin oxide (ITO) layer a
nd of metallic contacts. Their electronic and structural properties ar
e discussed.