In many non-crystalline Or amorphous dielectrics, for example in alumi
numoxide, siliconnitride, siliconoxide, or polyimide, the Kohlrausch b
ehaviour of the time dependent polarization current j similar to(-alph
a) is observed. This empirical law can be detected from the sub-micros
econd range up to several thousand seconds indicating a broad distribu
tion of relaxation times. The effect is caused by protons fluctuating
in double well potentials between neighboured electronegative atoms, i
. e. oxygens or nitrogens. The wells are located at the atomic shells.
The transition probability or its inverse, the relaxation time, depen
ds exponentially on the barrier height and for a tunneling transition
it depends also on the distance between the wells. The barrier height
increases with increasing distance. Therefore the distribution of inte
ratomic nearest neighbour distances in the amorphous state causes the
distribution of dielectric relaxation times. The model is confirmed by
experiments using palladium instead of gold electrodes. The palladium
absorbs hydrogen from the atmosphere and enhances the density of prot
ons in the dielectric resulting in an increase of the polarization str
ength. This is shown here for thermally grown siliconoxide and electro
n beam evaporated aluminumoxide.