Applications of analytical electron microscopy (TEM-EDXS) in investiga
tions of ceramic ferroelectric materials are described and discussed.
Emphasis is placed on various PZT and PLZT materials. Mixed oxide and
sol-gel derived loose powder, bulk ceramic material and sol-gel derive
d ferroelectric thin films on various substrates were analyzed and the
degree of homogeneity was determined. The influence of TEM sample pre
paration and the operating conditions of the transmission electron mic
roscope on deterioration of crystal structure, deviation of chemical c
omposition and the formation of a contamination layer are described an
d discussed.