Thin films of Ba1-xSrxTiO3 were prepared by off-axis laser deposition
on MgO (001) and YBa2Cu3O7-delta coated SrTiO3 (001) substrates. X-ray
diffraction in Theta-2 Theta geometry shows (001) oriented film growt
h of Ba1-xSrxTiO3. The epitaxial film growth was proved by pole figure
s and reflection high-energy electron diffraction (RHEED) patterns. At
omic force microscopy (AFM) and scanning electron microscopy (SEM) was
used to investigate the deposition temperature dependence of surface
roughness and grain size. Electrical properties were measured by a Saw
yer-Tower circuit and the integration of polarization current. For a d
eposition temperature of 800 degrees C and an oxygen pressure of 0.4 m
bar the BaTiO3 films show a remanent polarization of about 5 mu C/cm(2
) at a coercive field of 55 kV/cm, dielectric constants of about 320 a
nd dissipation factors of 0.02. The epsilon-T dependence was measured
for different Ba-Sr stoichiometries. The Ba1-xSrxTiO3 films on MgO sho
w optical properties near bulk values.