SOL-GEL SYNTHESIS AND CHARACTERIZATION OF MAGNESIUM-SILICATE THIN-FILMS

An H2O2-assisted, sol-gel synthesis route to precursors to magnesium s ilicate thin films is described. Films having ratios of Mg to Si from 1 to 3 were prepared by spin-coating. On substrates such as silicon, a luminum, steel, glass, and fused silica, repeated coatings were applie d, without intermittent treatment, to give similar to 0.5 mu m thick f ilms. Crack-free consolidation was achieved by conventional or microwa ve heating. Densification of the films on silicon was studied by IR sp ectroscopy, ellipsometry, and microhardness measurements; IR analysis indicated that these films were amorphous to at least 750 degrees C. A t high enough temperatures, durable films were obtained that exhibited antireflective properties.