DESIGN AND CHARACTERIZATION OF INTERCONNECTED, MICROPOROUS HYBRID THIN-FILMS BY A SOL-GEL PROCESS

Interconnected, microporous thin films have been prepared by formation of organic-inorganic hybrid materials via a sol-gel process. The spin -coating solution was obtained by hydrolyzing tetramethoxysilane (TMOS ) with different portions of methyltrimethoxysilane (MTMS) under acidi c catalyst. The organo-silicon groups incorporated into the structure reduced the extent of cross-linking of the silicate network during the curing process, and promoted the formation of a porous structure; The type I sorption isotherms and diffusion-controlled adsorption kinetic studies on the films indicated that the hybrid materials were micropo rous and that the interconnected pores had an effective pore size clos e td the diameter of nitrogen. The microporosity and microstructures o f the hybrid materials were also qualitatively supported by using TEM, Si-29 MAS/NMR, and FTIR spectroscopy.