ION FLUX BEHAVIOR IN HIGH-DENSITY PLASMAS

The available electron cyclotron resonance plasma sources have been si mulated in two-dimensional configuration space (Z, R) and three-dimens ional velocity space (V-z, V-r, V-theta). Using a hybrid model, we tre at ions as particles and electrons as fluid. The simulation is specifi ed for plasma parameters of the available apparatus and is focused on the ion flux distributions. For a set of given operating conditions, t he spatial distributions of electron temperature, plasma potential, pl asma density, ionization rate and the contours map of distributions of particles in different volume cells in velocity space are obtained; s tatistics on ions that hit the bottom surface are also reported. The d istributions of ion flux vectors on different cross-section planes in the plasma are given, and the phenomena of large radial diffusions of ions across magnetic force lines are also demonstrated. Finally, the i nfluences of microwave power and neutral gas pressure on the distribut ions of ion flux vectors on ZR-plane, ion flux radial distributions an d ion currents to all walls have been studied.