ULTRAFAST VOLTAGE-CONTRAST SCANNING PROBE MICROSCOPY

Although scanning probe microscopy is traditionally limited to slow te mporal response, techniques utilizing nonlinear tip-to-sample interact ions can be used to capture very fast temporal signals (voltages, in o ur case). Such SPM-based techniques may deliver unrivaled spatial and temporal resolution. We have developed a scanning force microscope pro be for measuring ultrafast voltage signals with picosecond time resolu tion. Measurements of VLSI and MMIC devices are shown.