Antiresonant reflecting optical waveguides (ARROW's) have been designe
d and fabricated in z-cut KTiOPO4 (KTP) by epsilon-beam direct writing
and double Rb <----> K ion exchange. Strong diffusion anisotropy allo
ws the realization of ARROW's in this electrooptical crystal, It was f
ound, that argon-ion dry etching of the crystal surface prevents the i
on exchange process totally, Using this as a new masking technique, an
tiresonant reflectors with lateral tolerances of less than 0.1 mu m co
uld be realized, Typical quasi-single-mode waveguiding and attenuation
of about 1.0 dB/cm were observed at lambda = 860 nm, which are in goo
d agreement with our simulations made by the vectorial finite element
method and effective index approach.