DEVELOPMENT OF ENVIRONMENTAL SCANNING ELECTRON-MICROSCOPY ELECTRON-BEAM PROFILE IMAGING WITH SELF-ASSEMBLED MONOLAYERS AND SECONDARY-ION MASS-SPECTROSCOPY

A method for demonstrating the scattering of the primary electron beam in the presence of a gas has been developed. A self-assembled decanet hiol monolayer is damaged by primary beam electrons. The damaged porti on of the monolayer is exchanged with another thiol-containing molecul e by immersion in solution. The resulting film is imaged using a secon dary ion mass spectrometer. Three-dimensional reconstruction of the da ta yields a representation of scattered electrons in the gaseous envir onment of the environmental scanning electron microscope.