We describe an efficient Monte Carlo simulation of profile decay via s
urface diffusion on a (1 + 1)D square-lattice system with suppressed r
oughening. Our algorithm takes advantage of analytical results for a o
ne-dimensional random walker and is valid in the low-temperature limit
of noninteracting activated walkers. We find that an initially sinuso
idal profile decays nonexponentially with a characteristic decay time
which increases with the initial amplitude. At a fixed ratio of initia
l amplitude to wavelength, the decay time tau increases with wavelengt
h lambda as tau approximately lambda3.5+/-0.1. In this model, profile
decay arises from irreversible decay of the peak and valley terraces r
ather than from step-step interactions.