Study of the electric field effect on the titanium oxide growth by mol
ecular layering (ML)-atomic layer epitaxy (ALE) method was produced in
the present work. It was found that electric field effect on the adso
rption process of the precursors during ML-ALE cycles under both polar
ities of a field. The field affect depended on a stage of a cycle ML-A
LE (half-reaction of ML-ALE). The strength of a field strongly influen
ced on the thickness of titanium oxide layers in the beginning of a gr
owth process until the layer thickness reached 5.0-6.0 nm. It was foun
d that field influence did not depend on a sublayer composition. The e
lectric field affect at different temperatures and voltages was studie
d. It was found that electric field effected a structure of the synthe
sized layers. At room temperature we synthesized a rutile structure -
the more thermodynamically stable modification of titanium oxide. The
explanation of these results was made on the basis of an electronic ad
sorption theory.