INTERFERENCE EFFECTS AT LASER-PULSE HEATING OF MULTILAYER STRUCTURES

Numerical computer simulation of laser pulse heating processes of mult ilayered structures of SOI type, dielectric or metal film on substrate s, is performed. The corresponding heat-diffusion equation is solved b y taking into account current phase transitions and interference of he ating radiation which is reflected from layers and phase boundaries. T he periodical change of reflectivity versus the thickness of one or se veral layers and the effect of radiation absorption and heating are sh own. The results of computer modelling are compared with experimental data at pulse heating of multilayer structures.