Epitaxial VO2 layers have been grown on the TiO2(110) rutile surface u
p to thicknesses of 5 ML. These ultrathin films have been characterize
d by means of x-ray photoelectron spectroscopy (XPS), x-ray photoelect
ron diffraction (XPD), low-energy electron diffraction (LEED), and ult
raviolet photoelectron spectroscopy (UPS) measurements. LEED and XPD s
tructural data demonstrate that the layer is both short- and long-rang
e ordered, and that it has a rutile structure. The success in preparat
ion of a single-crystalline epitaxial VO2 layer opens possibilities fo
r studying the properties and the surface chemistry of this interestin
g oxide, so far complicated by the difficulties in growing macroscopic
crystals. From the He I spectra it turns out that the shape, position
, and width of the 3d band closely resemble the UPS data of the bulk m
onoclinic semiconductive phase. The reported results could add new clu
es to a better understanding of the metal-to-semiconductor phase-trans
ition phenomenon in VO2.