A series of SiO2-TiO2 sol-gel films with and without heat treatment we
re analyzed by EXAFS and XANES spectroscopies. Both techniques indicat
e that essentially all Ti4+ ions remain four-fold coordinated, with a
Ti-O bond distance between 1.82-1.85 Angstrom. In the glassy films pro
duced by heat treatment at 900 degrees C, a gradual phase separation m
ay occur at the nanoscale, as the TiO2 concentration of the films incr
eases.