FIRST LIQUID PRECURSORS FOR THE CVD OF PALLADIUM FILMS

Authors
ZHANG YP PUDDEPHATT RJ
Citation
Yp. Zhang et Rj. Puddephatt, FIRST LIQUID PRECURSORS FOR THE CVD OF PALLADIUM FILMS, CHEMICAL VAPOR DEPOSITION, 3(2), 1997, pp. 81
Citations number
16
Categorie Soggetti
Materials Science, Coatings & Films","Materials Sciences, Composites",Electrochemistry,"Physics, Condensed Matter
Journal title
CHEMICAL VAPOR DEPOSITION → ACNP
ISSN journal
09481907
Volume
3
Issue
2
Year of publication
1997
Database
ISI
SICI code
0948-1907(1997)3:2<81:FLPFTC>2.0.ZU;2-9
Abstract
There is much interest in the CVD of Pd films, which have a range of m ajor applications. For Pd CVD, liquid precursors have many practical a dvantages and this paper reports the results of a systematic search fo r such precursors. Two have been found with the structure shown in the Figure, R1, R2, and R3 being either H or Me and R' = (t)Bu and R '' = C3F7 in both cases.