MOLECULAR PATTERNING USING 2-DIMENSIONAL POLYMER LANGMUIR-BLODGETT-FILMS

Citation
A. Aoki et T. Miyashita, MOLECULAR PATTERNING USING 2-DIMENSIONAL POLYMER LANGMUIR-BLODGETT-FILMS, Advanced materials, 9(4), 1997, pp. 361
Citations number
17
Categorie Soggetti
Material Science
Journal title
ISSN journal
09359648
Volume
9
Issue
4
Year of publication
1997
Database
ISI
SICI code
0935-9648(1997)9:4<361:MPU2PL>2.0.ZU;2-K
Abstract
Research News: Langmuir-Blodgett (LB) films for high-resolution resist s for the preparation of integrated circuits with higher densities are reviewed briefly A technique based on the polymerization of monomeric LB films and a newer one based on the two-dimensional cross-linking o f a polymeric LB film are described. It is demonstrated that cross-lin kable polymeric LB films have the ability to create high-resolution mo lecular patterning with nanometer (layer) thickness. Examples of patte rns produced with such films are presented.