Kj. Wilkerson et al., REACTION CHEMISTRY OF ZNTE METALORGANIC VAPOR-PHASE EPITAXY, The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory, 101(13), 1997, pp. 2451-2458
The reaction chemistry of zinc telluride (ZnTe) metalorganic vapor-pha
se epitaxy (MOVPE) from dimethylzinc (DMZn), diethylzinc (DEZn), and d
iisopropyltelluride (DIPTe) has been studied using on-line gas chromat
ography and infrared spectroscopy. Two growth regimes have been discov
ered: one at low values of the II/VI ratio and the other at higher val
ues of the II/VI ratio. In the first regime, the group VI compound is
consumed in excess, while in the second regime, the group II compound
is consumed in excess. The crossover point lies at II/VI = 5.0 for DMZ
n and at II/VI = 0.3 for DEZn. Stoichiometric ZnTe is deposited under
all growth conditions. The excess DIPTe consumed is converted into vol
atile diisopropylditelluride and isopropyltellurol. Conversely, the ex
cess DEZn or DMZn consumed produces zinc metal. These waste byproducts
accumulate in the outlet of the reactor. The hydrocarbon products gen
erated from the ethyl and isopropyl ligands are indicative of radical
disproportionation, recombination, and hydrogenation reactions. Howeve
r, the methyl ligands mainly undergo surface hydrogenation to produce
methane.