RANGE PROFILES OF FLUORINE IMPLANTED YBCO FILMS

YBa2CU3O7-delta (YBCO, 0 less than or equal to delta less than or equa l to 0.2) films were implanted by 80, 120, 200, 270 and 350 keV F-19 i ons with the same dose of 1 x 10(15) atoms cm(-2). The depth profiles of fluorine have been accurately measured using F-19(p, alpha gamma)O- 16 resonant nuclear reaction at E(R) = 872.1 keV with width Gamma = 4. 2 keV. These true distributions of fluorine were extracted from the ex perimental excitation yield curves by a proper multiple-convolution me thod. The range distribution parameters, the average projected ranges Rp and the projected range straggles Delta R(p) were then obtained. Th ese experimental parameters were compared with theoretical predictions using the Monte Carte simulation of TRIM'92. In present work of the F -YBCO system, the experimental values of Rp agree with the theoretical results very well to within +/- 4%, but the experimental projected ra nge straggles, Delta R(p), are larger than the TRIM'92 predictions by factors of more than 20%. These results may contribute to progress bot h in ion beam modification in high-temperature superconducting films a nd range profile theory of ions in polycompound targets.