APPLICATION OF X-RAYS TO THE STUDY OF THE SURFACE-ROUGHNESS

The paper presents problems of an application of grazing incidence X-r ay reflectivity as a tool for investigations of the surface roughness. The theoretical calculations are based on Fresnel theory. The surface roughness reduces the reflected amplitude therefore a damping factor describing art influence of that is introduced into equations. The res ults of computer simulations have been used for estimation of the meas ured surface roughness of thin epitaxial Si film and GaAs single cryst al.