X-RAY AND ELLIPSOMETRIC STUDIES OF SELF-ASSEMBLED MONOLAYERS OF FLUORINATED CHLOROSILANES

Results of X-ray and ellipsometric studies on self-assembled monolayer films of three fluorinated chlorosilanes are presented. By inferring an index of refraction, the monolayer thicknesses obtained from both t hese types of studies are self-consistent. The tilt of the molecules w ith respect to the layer normal is found to be strongly dependent on t he functionality of (i.e. the number of chlorine atoms attached to) th e terminal Si atom of the molecule.