Vm. Dubin et al., SELECTIVE AND BLANKET ELECTROLESS COPPER DEPOSITION FOR ULTRALARGE SCALE INTEGRATION, Journal of the Electrochemical Society, 144(3), 1997, pp. 898-908
Electroless Cu thermodynamics, electrochemistry, mechanism, kinetics,
and mass transport are reviewed. Electroless Cu deposition is a thermo
dynamically favorable and kinetically inhibited process, with two elec
trochemical reactions including anodic oxidation of a reducing agent a
nd cathodic reduction of metal ions occurring simultaneously. with a m
ultistep catalytic redox mechanism. an Arrhenius type of rate equation
, and mass-transport Limited reaction in narrow and deep features such
as subhalf micron trenches and vias of high aspect ratios (>3). Selec
tive and blanket electroless Cu deposition from formaldehyde-based sol
utions with ethylenediaminetetraacetic acid as a complexing agent was
investigated for trench/via filling applications. A single-wafer elect
roless Cu deposition system with up to 8 in. wafer capab ility has bee
n designed and manufactured. An electroless Cu deposition solution and
operation conditions have been optimized to obtain electroless Cu fil
ms at high deposition rate (similar to 75 to 120 nm/min), with low res
istivity (rho < 2 mu Omega cm), low surface roughness (R(a) similar to
10 to 15 nm for similar to 1.5 mu m thick deposits) and good electric
al uniformity (std dev <3% for 6 in. wafers and 5 to 7% for 8 in. wafe
rs). A novel dry seeding method on sputtered Cu/Al bilayers has been d
eveloped to provide protection of Cu catalytic properties from passiva
tion by using an Al sacrificial layer and to obtain uniform initiation
and blanket growth of electroless Cu by in situ Al dissolution in the
plating bath. Electroless Cu films blanket deposited on sputtered Cu/
Al seed layer were conformal with 100% step coverage. A novel wet seed
ing method has been developed with Cu contact displacement deposition
on a TiN diffusion barrier to provide selective and blanket electroles
s copper plating. Subhalf micron (down to 0.3 mu m) trenches and vias
of high aspect ratios (up to 5:1) were completely filled for both blan
ket and selective electroless deposition modes.