SOME MOVING-BOUNDARY PROBLEMS ARISING FROM A MODEL FOR SOLID-STATE DIFFUSION

Authors
KING JR MEERE MG
Citation
Jr. King et Mg. Meere, SOME MOVING-BOUNDARY PROBLEMS ARISING FROM A MODEL FOR SOLID-STATE DIFFUSION, Journal of engineering mathematics, 31(1), 1997, pp. 1-27
Citations number
6
Categorie Soggetti
Computer Application, Chemistry & Engineering",Mathematics,Engineering
Journal title
Journal of engineering mathematics → ACNP
ISSN journal
00220833
Volume
31
Issue
1
Year of publication
1997
Pages
1 - 27
Database
ISI
SICI code
0022-0833(1997)31:1<1:SMPAFA>2.0.ZU;2-W
Abstract
In this paper we formulate and analyse moving-boundary problems arisin g from the dissociative model for impurity diffusion in a semiconducto r. We consider one-dimensional surface-source and implant problems and two-dimensional diffusion under a mask edge. The diffused profiles wh ich result exhibit a number of novel features.