Jr. King et Mg. Meere, SOME MOVING-BOUNDARY PROBLEMS ARISING FROM A MODEL FOR SOLID-STATE DIFFUSION, Journal of engineering mathematics, 31(1), 1997, pp. 1-27
In this paper we formulate and analyse moving-boundary problems arisin
g from the dissociative model for impurity diffusion in a semiconducto
r. We consider one-dimensional surface-source and implant problems and
two-dimensional diffusion under a mask edge. The diffused profiles wh
ich result exhibit a number of novel features.