REACTION-PRODUCTS OF DICHLOROSILANE OXIDATION AS STUDIED BY IR SPECTROPHOTOMETRY

Authors
RUBTSOV NM RYZHKOV OT CHERNYSH VI
Citation
Nm. Rubtsov et al., REACTION-PRODUCTS OF DICHLOROSILANE OXIDATION AS STUDIED BY IR SPECTROPHOTOMETRY, Kinetics and catalysis, 36(5), 1995, pp. 589-593
Citations number
27
Categorie Soggetti
Chemistry Physical
Journal title
Kinetics and catalysis → ACNP
ISSN journal
00231584
Volume
36
Issue
5
Year of publication
1995
Pages
589 - 593
Database
ISI
SICI code
0023-1584(1995)36:5<589:RODOAS>2.0.ZU;2-0
Abstract
Infrared spectrophotometry is used to determine the reaction products and their concentrations for dichlorosilane oxidation at temperatures of 100 - 150 degrees C and pressures of 10 - 24 torr. It is found that for the 20 and 50% mixtures of dichlorosilane with oxygen, the overal l reaction is described by the stoichiometric equation SiH2Cl2 + O-2 = SiO2 + 2HCl.