CLUSTER SOLID INTERACTIONS - A MOLECULAR-DYNAMICS INVESTIGATION

The interaction of small energetic clusters of metal atoms with surfac es has been investigated by molecular dynamics computer simulations. A wide variety of cluster-solid combinations have been Studied so that the effects of the energy, size, and angle of incidence of the cluster , and the relative elastic properties of the cluster and substrate cou ld be elucidated. 'Soft landings' were also investigated. From these s tudies, a mechanism map for cluster-solid interactions is developed. T he results have particular importance for cluster beam deposition of t hin films. The simulations are fully dynamical and 3-dimensional; they employ embedded-atom method potentials, which have been modified for interactions at close separations. A scheme for reducing the CPU time that is required for these and other simulations of radiation effects is described.