Jh. Jean et al., LOW-TEMPERATURE, LOW-DIELECTRIC, CRYSTALLIZABLE GLASS COMPOSITE, IEEE transactions on components, packaging, and manufacturing technology. Part B, Advanced packaging, 18(4), 1995, pp. 751-754
A low k crystallizable glass composite containing borosilicate glass a
nd cordierite glass has been developed. Crystallization and densificat
ion of cordierite glass is enhanced with borosilicate glass present. F
or the compositions identified, a high sintered density greater than 9
5% can be obtained at 825-900 degrees C. The crystallizable glass comp
osite has a dielectric constant of 5.3 and a dielectric loss less than
0.3% at 1 MHz, and a tunable thermal expansion coefficient of 3.9-4.5
x 10(-6) K-1 in the temperature range of 20-200 degrees C by controll
ing heat treatment.