M. Hanabusa et K. Tsujihara, DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY EXCIMER LASERS USING FROZEN ACETYLENE, IEEE journal of selected topics in quantum electronics, 1(3), 1995, pp. 848-851
Diamond-like carbon (DLC) films were deposited by laser ablation with
the target made of Frozen acetylene, instead of conventional graphite.
An ArF laser and a KrF laser were used to dissociate frozen acetylene
and to deposit DLC films on quartz substrates below 300 degrees C. Th
e C-H bond was more abundant in the films deposited by the KrF laser.
It was possible to deposit particle-free films in contrast to laser ab
lation of graphite targets. Experimental results suggested the importa
nce of energetic and charged species ejected from frozen acetylene.