DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY EXCIMER LASERS USING FROZEN ACETYLENE

Diamond-like carbon (DLC) films were deposited by laser ablation with the target made of Frozen acetylene, instead of conventional graphite. An ArF laser and a KrF laser were used to dissociate frozen acetylene and to deposit DLC films on quartz substrates below 300 degrees C. Th e C-H bond was more abundant in the films deposited by the KrF laser. It was possible to deposit particle-free films in contrast to laser ab lation of graphite targets. Experimental results suggested the importa nce of energetic and charged species ejected from frozen acetylene.