X-RAY-DIFFRACTION FROM EPITAXIAL MULTILAYERED SURFACE GRATINGS

X-ray diffraction from simple monocrystalline and epitaxial multilayer ed surface gratings will be described theoretically by use of a distor ted wave Born approximation of second order. The intensity patterns of simple and multilayered gratings have been simulated by this treatmen t and compared with the kinematical approximation. The gratings act si multaneously as reflection and transmission gratings. This gives rise to Umweganregung also between the grating and the dynamical diffractin g planar structure including the substrate.