INVESTIGATION OF SURFACE MECHANISM OF PRE FERENTIAL SPUTTERING OF 2-COMPONENT TARGETS

Authors
BACHURIN VI NIKITIN AM SAMOILOV VN TATUR AE YASTRZHEMBSKY VI
Citation
Vi. Bachurin et al., INVESTIGATION OF SURFACE MECHANISM OF PRE FERENTIAL SPUTTERING OF 2-COMPONENT TARGETS, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 58(3), 1994, pp. 102-108
Citations number
13
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
58
Issue
3
Year of publication
1994
Pages
102 - 108
Database
ISI
SICI code
0367-6765(1994)58:3<102:IOSMOP>2.0.ZU;2-R