INVESTIGATION OF GRAPHITE AND STAINLESS-S TEEL SPUTTERING BY OXYGEN PLASMA FLOWS

Authors
AKISHIN AI KULIKAUSKAS VS CHERNIK VN
Citation
Ai. Akishin et al., INVESTIGATION OF GRAPHITE AND STAINLESS-S TEEL SPUTTERING BY OXYGEN PLASMA FLOWS, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 58(3), 1994, pp. 109-115
Citations number
15
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
58
Issue
3
Year of publication
1994
Pages
109 - 115
Database
ISI
SICI code
0367-6765(1994)58:3<109:IOGAST>2.0.ZU;2-F