2-DIMENSIONAL BOLTZMANN TRANSPORT-EQUATION APPROACH TO SIMULATION OF LOCAL ION-IMPLANTATION

Authors
KOMAROV FF MOZOLEVSKI IE ROGACH VP
Citation
Ff. Komarov et al., 2-DIMENSIONAL BOLTZMANN TRANSPORT-EQUATION APPROACH TO SIMULATION OF LOCAL ION-IMPLANTATION, Radiation effects and defects in solids, 133(2), 1995, pp. 133-139
Citations number
14
Categorie Soggetti
Physics, Condensed Matter","Nuclear Sciences & Tecnology
Journal title
Radiation effects and defects in solids → ACNP
ISSN journal
10420150
Volume
133
Issue
2
Year of publication
1995
Pages
133 - 139
Database
ISI
SICI code
1042-0150(1995)133:2<133:2BTATS>2.0.ZU;2-M
Abstract
A new theoretical model and software tool is proposed for simulation o f two-dimensional local ion implantation in a target of arbitrary geom etry. The program uses an algorithm of numerical solution of the bound ary value problem for Boltzmann transport equation in two dimensions a nd permits to calculate the angular and energy distribution function o f the particles moving in a multilayered multicomponent target. The pr ogram is essentially time saving and can be implemented on an IBM PC A T standard configuration computer.