OPTICAL AND STRUCTURAL PROPER TIES OF ZNS AND ZNS-MN FILMS PREPARED BY CVD METHOD

Films of ZnS and ZnS:Mn 0.1 to 5.0 mu m thick were prepared by the CVD method using new volatile complex compounds belonging to dithiocarbam ates and xanthates. Their chemical composition, density, structural an d optical properties were studied. It is shown that at relatively low temperatures (T approximate to 220 degrees C) monophase doped ZnS:Mn f ilms can be fabricated with uniform distribution of Mn over the film t hickness. Depending on selection of precursors and presence of dopant, ZnS and ZnS:Mn films can be of sphalerite or wurtzite structure. The refractive index of the films was determined at 0.633 and 20.0 mu m wa velength.