A model of the formation of a p-type surface conductive layer on depos
ited diamond films is proposed. According to the model, the ionization
of acid in water produces oxonium ion (H3O+) which reacts with hydrog
en on diamond films and causes the creation of holes in diamond films.
The model also explains the disappearance of the p-type surface condu
ctive layer by the action of alkaline substances. The experimental res
ults concerning the change in electrical resistance at the surface of
diamond films can be explained using the proposed model.