Tk. Ku et al., SIMULATION OF THE ELECTRICAL CHARACTERISTICS OF FIELD-EMISSION TRIODES WITH VARIOUS GATE STRUCTURES, JPN J A P 1, 34(10), 1995, pp. 5789-5796
A new two-dimensional numerical simulation which can accurately reprod
uce the empirical electrical characteristics of vertical field-emissio
n triodes (FET's) with various gate geometries has been developed. The
electrical characteristics of volcano-shaped-gate FET's were simulate
d for the first time and compared with those of planar-gate ones. Volc
ano-shaped-gate FET's exhibit significant advantages over planar-gate
ones due to their superior current-voltage (I-V) properties and larger
tolerance of fabrication error. A reasonable definition of emission a
rea was obtained by applying the non-uniform current density model. Fo
r sub-micron gate aperture, the gate current is obvious only if the de
vice structure is deeply tip-recessed. On the basis of the evaluation
of the device structures including the tip cone angle, the related tip
-to-gate height, the emitter shape, and the shrinkage of gate aperture
, a high-aspect-ratio conical emitter with a small tip radius will be
the optimum structure of FET's for low-voltage operation.