SPATIAL-DISTRIBUTION AND TRANSPORT OF AN ELECTRON-CYCLOTRON-RESONANCEPLASMA GENERATED USING DOMINANT-MODE MICROWAVE

The relationship between the plasma uniformity and the microwave elect ric field was investigated for various levels of microwave power by in troducing only the dominant-mode microwave: either the circular TE(11) mode or the rectangular TE(10) mode. The plasma uniformity was found to change in three stages according to the electron density depending on the microwave transmission characteristics in the plasma. The fluct uations of the plasma emission were also investigated in several types of discharges. A fixed spatial distribution of the microwave electric field was found to be effective for stabilizing the plasma. The high- density plasma above 1 x 10(11) cm(-3) was found to be more stable.