CONTROL OF X-RAY-BEAM FLUCTUATION IN SYNCHROTRON-RADIATION LITHOGRAPHY BEAMLINE

Using the focusing property of beamline optics, we have presented a ne w technique to directly measure the position and emission angle drifts of the synchrotron radiation (SR) source which may deteriorate the op tical performance of a beamline consisting of focusing mirrors. A new methodology is also proposed to correct the SR source drifts, combinin g the above measuring technique, a SR beam position monitor (SRBPM) mo unted on the beamline and the excitation of two steering magnets insta lled in a storage ring.