CHEMICAL-VAPOR-DEPOSITION OF TIN FOR SUB-0.5-MU-M ULSI CIRCUITS

Authors
EIZENBERG M
Citation
M. Eizenberg, CHEMICAL-VAPOR-DEPOSITION OF TIN FOR SUB-0.5-MU-M ULSI CIRCUITS, MRS bulletin, 20(11), 1995, pp. 38-41
Citations number
16
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
20
Issue
11
Year of publication
1995
Pages
38 - 41
Database
ISI
SICI code
0883-7694(1995)20:11<38:COTFSU>2.0.ZU;2-G