SIMULATION OF MICROSTRUCTURE AND SURFACE PROFILES OF THIN-FILMS FOR VLSI METALLIZATION

Authors
SMY T DEW SK BRETT MJ
Citation
T. Smy et al., SIMULATION OF MICROSTRUCTURE AND SURFACE PROFILES OF THIN-FILMS FOR VLSI METALLIZATION, MRS bulletin, 20(11), 1995, pp. 65-69
Citations number
16
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
20
Issue
11
Year of publication
1995
Pages
65 - 69
Database
ISI
SICI code
0883-7694(1995)20:11<65:SOMASP>2.0.ZU;2-V