Y. Ohba et al., HYDROTHERMAL SYNTHESES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS FABRICATED A CONTINUOUS-SUPPLY AUTOCLAVE, JPN J A P 1, 34(9B), 1995, pp. 5216-5219
Crystalline lead zirconate titanate (PZT) films formed hydrothermally
in a test-tube autoclave have heterogeneous chemical composition, beca
use the concentration of each ion (Pb, Zr and Ti) in solution cannot b
e controlled. A continuous-supply autoclave system was used to obtain
PZT films with desirable chemical compositions. A solution was sampled
from the reactor during the reaction, and the change in concentration
of elements was measured. Based on the results, the appropriate compo
sition and concentration were determined. The obtained PZT film has an
intermediate layer between the film and titanium substrate. The layer
was much thinner than that obtained with a test-tube autoclave.