Te. Levine et al., DIRECT AND INDIRECT MEASUREMENTS OF HYDROGEN, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 103(3), 1995, pp. 359-361
We have demonstrated that the content of hydrogen in carbon-based film
s can be reliably calculated from a measurement made either directly u
sing forward recoiled hydrogen or indirectly using backscattered heliu
m. The method makes use of the surface signal height ratio of a sample
of unknown composition to a standard of known composition. This appro
ach allows elimination of several experimental parameters. The method
assumes validity of Bragg's rule, potential deviations from which acco
unt for the majority of the absolute uncertainty in the hydrogen fract
ion. In general however, we have found agreement in hydrogen content b
etween the two techniques for several carbon-based films.