(001)-ORIENTED PBTIO3 FERROELECTRIC THIN-FILMS GROWN ON SI BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

PbTiO3 ferroelectric thin films have been prepared on Si (001) by meta l-organic chemical vapour deposition. The as-grown films were characte rized by scanning electron microscopy, x-ray diffraction and Raman spe ctroscopy. It is shown that the films were highly (001) oriented and h ad essentially the same lattice constants as the bulk single crystal. However, the as-grown films were subject to internal stress as shown b y a downshift in the Raman modes when compared with a bulk single crys tal.